| Varian E-550 Spare Parts | ||||
| Model | Parts Name | P/N # | Description | |
| E 500 | PCB | E15002602 | new, Multi faragay cup | |
| E 500 | PCB | E15000033 | new, Digital I/O pcb | |
| E 500 | PCB | E15001670 | new, Gas flow control, rev:4 | |
| E 500 | PCB | E15002390 | new, Multi gauge.con | |
| E 500 | PCB | E15001660 | new, Flow cntrl press, rev 2 | |
| E 500 | PCB | E11049741 | new, Roplat drive mech , | |
| E 500 | PCB | new, Opti-fiber | ||
| E 500 | PCB | E15002370 | new, Kit replacement, | |
| E 500 | PCB | E15000206 | new, Motion con board, | |